Overview
Scanning Electron Microscope FM-SEM-A100 is a sophisticated imaging instrument used for high-resolution visualization of surfaces at the nanoscale level. Equipped with Schottky Field Emission Electron Gun, with in cylinder Deceleration. It uses a focused beam of electrons to scan the specimen's surface. It has five axis automatic working stage.
Specifications :
| Magnification |
1x to 2,500,000x |
| Resolution |
1.0 nm at 15 kV (SE), 1.5 nm at 1 kV (SE), 0.8 nm at 30 kV (STEM) |
| Voltage |
20 V to 30 kV |
| Electron Gun |
Schottky Field Emission Electron Gun, In- cylinder Deceleration, Electromagnetic Composite Objective, Water-cooled Thermostatic Objective |
| Vacuum System |
| Type | Fully Auto Control Oil Free Vacuum | | Sample Room pressure | < 5×10-4 Pa | | Electron Gun pressure | < 9 ×10-8 Pa |
|
| Vacuum Pump |
| Mechanical pump flow rate | > 6 m3/h | | Turbo molecular pump flow rate | > 240 L/s | | Ion pump flow rate | >25 L/s |
|
| Working Stage |
5 Axes Auto Stage, X：120 mm, Y：115 mm, Z：50 mm, T: -10° to + 90°, R: 360° |
| Camera |
Vertical Optical Navigation CCD, Horizontal Monitoring CCD |
| Detector |
Secondary Electron Detector (ETD), High Angle Electron Detector In lens |
| Software |
SEM Operation Software |
| Display |
Multi-Channel Display |
| Navigation |
Gesture navigation |
| Image enhancement features |
Auto Brightness Contrast, Auto Focus, Auto Astigmatism |
| Image format support |
TIFF, JPG, BMP, PNG |
| Computer specification |
Working Station, Memory: 16 G, Hard Disk: 512 G, 24-inch Monitor, Win10 operating system |
| Installation Room |
| Dimension | L > 3000 mm, W > 4000 mm, H > 2300 mm | | Temperature | 20 to 25 ℃ | | Humidity | < 50% |
|
| Power Supply |
AC 220 V (±10 %), 50 Hz，2 kVA |
